Opc is considered to be useful in two ways : first it enables smaller features with closer proximities to be printed on the same area ; second , it increases the process latitude , decreases the variations of linewidth across a chip and could potentially enhance yield Opc是非常有用的,一方面使用opc ,能在相同的面積上加工出更小的特征線寬;另一方面,使用opc提高了工藝窗口,降低了整個(gè)芯片特征尺寸的變化,潛在地提高了集成電路的生產(chǎn)成品率。